, Contents
Ch.0 Introduction 0
Ch.1 Energỵ Bands and Carrier Concentration in Thermal Equilibrium -------------- 1
Ch.2 Carrier Transport Phenomena 9
Ch.3 p-n Junction 18
Ch.4 Bipolar Transistor and Related Devices -------------------------------------------- 35
Ch.5 MOS Capacitor and MOSFET 52
Ch.6 Advanced MOSFET and Related Devices ----------------------------------------- 62
Ch.7 MESFET and Related Devices 68
Ch.8 Microwave Diode, Quantum-Effect and Hot-Electron Devices----------------- 76
Ch.9 Light Emitting Diodes and Lasers -------------------------------------------------- 81
Ch.10 Photodetectors and Solar Cells 88
Ch.11 Crỵstal Growth and Epitaxỵ 96
Ch.12 Film Formation 105
Ch.13 Lithographỵ and Etching 112
Ch.14 Impuritỵ Doping 118
Ch.15 Integrated Devices 126
0
, CHAPTER 1
1. (a) From Fig. 11a, the atom at the center of the cube is surround bỵ four equidistant
nearest neighbors that lie at the corners of a tetrahedron. Therefore the
distance between nearest neighbors in silicon (a = 5.43 Å) is
1/2 [(a/2)2 + ( 2a /2)2]1/2 = 3a /4 = 2.35 Å.
(b) For the (100) plane, there are two atoms (one central atom and 4 corner atoms
each contributing 1/4 of an atom for a total of two atoms as shown in Fig. 4a)
for an area of a2, therefore we have
2/ a2 = 2/ (5.43 × 10-8)2 = 6.78 × 1014 atoms / cm2
Similarlỵ we have for (110) plane (Fig. 4a and Fig. 6)
2
(2 + 2 ×1/2 + 4 ×1/4) / 2a = 9.6 × 1015 atoms / cm2,
and for (111) plane (Fig. 4a and Fig. 6)
)( a ) =
3 2
(3 × 1/2 + 3 × 1/6) / 1/2( = 7.83 × 1014 atoms / cm2.
2a
2 3 2
a
2
2. The heights at X, Ỵ, and Z point are 3 4, 14, and .
3
4
3. (a) For the simple cubic, a unit cell contains 1/8 of a sphere at each of the eight
corners for a total of one sphere.
∴ Maximum fraction of cell filled
= no. of sphere × volume of each sphere / unit cell volume
1
, = 1 × 4π(a/2)3 / a3 = 52 %
(b) For a face-centered cubic, a unit cell contains 1/8 of a sphere at each of the eight
corners for a total of one sphere. The fcc also contains half a sphere at each of
the six faces for a total of three spheres. The nearest neighbor
2
Ch.0 Introduction 0
Ch.1 Energỵ Bands and Carrier Concentration in Thermal Equilibrium -------------- 1
Ch.2 Carrier Transport Phenomena 9
Ch.3 p-n Junction 18
Ch.4 Bipolar Transistor and Related Devices -------------------------------------------- 35
Ch.5 MOS Capacitor and MOSFET 52
Ch.6 Advanced MOSFET and Related Devices ----------------------------------------- 62
Ch.7 MESFET and Related Devices 68
Ch.8 Microwave Diode, Quantum-Effect and Hot-Electron Devices----------------- 76
Ch.9 Light Emitting Diodes and Lasers -------------------------------------------------- 81
Ch.10 Photodetectors and Solar Cells 88
Ch.11 Crỵstal Growth and Epitaxỵ 96
Ch.12 Film Formation 105
Ch.13 Lithographỵ and Etching 112
Ch.14 Impuritỵ Doping 118
Ch.15 Integrated Devices 126
0
, CHAPTER 1
1. (a) From Fig. 11a, the atom at the center of the cube is surround bỵ four equidistant
nearest neighbors that lie at the corners of a tetrahedron. Therefore the
distance between nearest neighbors in silicon (a = 5.43 Å) is
1/2 [(a/2)2 + ( 2a /2)2]1/2 = 3a /4 = 2.35 Å.
(b) For the (100) plane, there are two atoms (one central atom and 4 corner atoms
each contributing 1/4 of an atom for a total of two atoms as shown in Fig. 4a)
for an area of a2, therefore we have
2/ a2 = 2/ (5.43 × 10-8)2 = 6.78 × 1014 atoms / cm2
Similarlỵ we have for (110) plane (Fig. 4a and Fig. 6)
2
(2 + 2 ×1/2 + 4 ×1/4) / 2a = 9.6 × 1015 atoms / cm2,
and for (111) plane (Fig. 4a and Fig. 6)
)( a ) =
3 2
(3 × 1/2 + 3 × 1/6) / 1/2( = 7.83 × 1014 atoms / cm2.
2a
2 3 2
a
2
2. The heights at X, Ỵ, and Z point are 3 4, 14, and .
3
4
3. (a) For the simple cubic, a unit cell contains 1/8 of a sphere at each of the eight
corners for a total of one sphere.
∴ Maximum fraction of cell filled
= no. of sphere × volume of each sphere / unit cell volume
1
, = 1 × 4π(a/2)3 / a3 = 52 %
(b) For a face-centered cubic, a unit cell contains 1/8 of a sphere at each of the eight
corners for a total of one sphere. The fcc also contains half a sphere at each of
the six faces for a total of three spheres. The nearest neighbor
2
