ECE 4360/MSE 5410 – Spring 2020 Prof. Grace Huili Xing - Cornell

HW#3-1

NanoFabrication and Characterization of Electronics

Homework set #3

Name: _________Solutions____

1. (20 points) (Parameter values in a Typical Plasma System) We

have learned the plasma system in PECVD, sputtering and dry etch

without knowing the values of various parameters in the system.

Plasma physics is beyond the scope of this fabrication course, but we

will use this homework to illustrate the parameter values...
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