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MAE M183B Final Review Exam questions 2026 Update with complete solutions. What are the main steps of photolithography and their purpose? -PR coating (pattern medium); exposure (transfer image); development (reveal pattern); etch (transfer to layer) W
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MAE M183B Final Review Exam questions 2026 Update with complete solutions. What are the main steps of photolithography and their purpose? -PR coating (pattern medium); exposure (transfer image); development (reveal pattern); etch (transfer to layer) Why is projection lithography preferred over contact lithography? -Better resolution less contamination and reusable masks What determines the resolution of optical lithography? -Wavelength numerical aperture and process factor k1 Why does decreasing wavelength improve resolution? -Reduces diffraction limit and enables smaller features What is numerical apertur
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