Mechatronics and MEMS Lecture notes

This Document contains the topics as described below. MODULE 1 (10 HOURS) Evolution of Mechatronics, components of the mechatronic system, types of mechatronic products, Signal theory, signal analysis, and processing. Basic electronics devices: junction diodes, Bipolar transistors Basic Digital Technology: Digital number system, Binary number system, Hexadecimal number system, Binary addition, Boolean Algebra, Logic function, Universal GATES, FLIP-FLOP, Registers counters. MODULE II (10 HOURS) System modeling: Frequency response, Mechanical system, electrical system, Thermal system, Fluid system. Actuators- Electric motors; D.C. Motors, Stepper motor, , Hydraulic actuators, Pneumatic actuators Transducer and Sensors : Principles, difference between transducer and sensors, transducer types – photo emissive, photo conductive, photovoltaic, thermistors, Thermocouple, Inductive, capacitive, Peizoelectric, MODULE III (10 HOURS) Overview of MEMS and Microsystems. Micromachining Techniques: Silicon as material for micromachining, Photolithography, thin film deposition, doping, wet and dry etching, surface and bulk micromachining, Wafer bonding, packaging. MODULE IV (10 HOURS) Microsystem Modeling and Design: Mechanics of deformable bodies, Energy method, Estimation of stiffness and damping for different micro-structures, Modeling of electromechanical systems, Pull-in voltage. MEMS Applications: Mechanical sensors and actuators: Piezoresistive pressure sensors, MEMS capacitive accelerometer, Gyroscopes, Piezoelectric actuators.