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A Machine-Learning Classification Approach for IC Manufacturing Control Based on Test Structure Measurements
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7

August 2024

2024/2025

A+
T metric electrical data which can then be used to evaluate the performance of an integrated circuit manufacturing process. The test chips contain test structures which provide specific electrical parameters. Coupled with a computer-controlled parametric test system, they can provide the user with information that cannot otherwise be obtained because of the nature of the measurement, the measurement time, or the cost associated with other methods of performing the measurement. Comp...
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