SOLUTION MANUAL
, Foundations of MEMS 2rd Edition Chang Liu Solutions Manual
This is the Solution Manual for Foundations of MEMS 2rd Edition Chang Liu. Foundations of
MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an
interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the
MEMS field by employing concepts from both the electrical and mechanical engineering
domains and by incorporating evolving microfabrication technology ? all in a time-efficient and
methodical manner. A wealth of examples and problems solidify students? understanding of
abstract concepts and provide ample opportunities for practicing critical thinking.
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