AEROSPACE ENGINEERING DEPARTMENT
USN
B.Tech.7th Sem TEST - I
Subject: MEMS Session: Jul – Dec 2020
Subject Code: 17AE Duration: 3 HRS
Date of Examination: 07-09-2020 , Max Marks:10 X 10 = 100
Note:
✓ Answer all Questions and each full question carries 10 Marks.
✓ Provide neat diagrams wherever applicable.
Bloom’s
Mark
Q.N Question Level COs
s
o
1a CVD stands for in semiconductor process as 1 L1 CO1
a) Critical vacuum deposition b) Chemical vacuum
deposition c) Controlled vacuum deposition
1b Mathematical model used for diffusion 1 L1 CO1
a)Fourier’s Transform b)Newton’s Law c) Fick’s law
1c Energy source used for Ion Implantation 1 L1 CO1
a) an ion beam b) Heating c) EM wave
1d ) Pressure drop in a fluid through the smaller circular 1 L1 CO1
conduit is Much greater b) about equal c) much less than
larger conduct
1e wet oxidation is 1 L1 CO1
a) faster than dry oxidation b) slower than plasma
oxidation c) slower than dry oxidation
1f Barometer uses 1 L1 CO1
a) Pressure Sensor b) Gyroscope c) Laser Diode
1g P type silicon is doped with 1 L1 CO1
a) Antimony b) Boron c) Nickel
1h For fine resolution photoresist used is 1 L1 CO1
a) Negative b) Positive c) polymer
1i CMOS uses 1 L1 CO1
a) lower power b) Higher power c) none
1j Melting point of silicon is 1 L1 CO1
a) 1200 deg C B) 1410 deg C C) 1800 deg C
2a Explain important applications of Micro Systems in 6 L2 CO1
Automobile and Aerospace Application
Page 1 of 2
, Course Outcomes
CO - 1 Understand the basics Micro Electro Mechanical Systems(MEMS) and Applications
CO - 2 Analyze the scaling laws and its practical use
CO - 3 Understand Mechanical, Electrical and Electronic aspects of sensors and actuators
CO - 4 Apply the MEMS devices for aerospace application .
L1 L2 L3 L4 L5 L6
Remembering Understanding Applying Analyzing Evaluating Creating
Course Outcomes:
Mapping Course Outcomes with Program Outcomes:
CO/PO: Mapping
(3/2/1 indicates strength of correlation) 3-Substantial (High), 2-Moderate (Medium), 1-Slight (Low)
Course Program Outcome (POs)
Outcome
PO1 PO2 PO3 PO4 PO5 PO6 PO7 PO8 PO9 PO10 PO11 PO12
(COs)
CO-1 3 1 1 1 1 1
CO-2 3 1 1 1 1
CO-3 3 1 1 1 1
CO-4 3 1 1 1 1 1
Q02 – 09 can have subdivisions (Like 3a and 3b
Page 2 of 2
, AEROSPACE ENGINEERING DEPARTMENT
USN
B.Tech.7th Sem TEST - II
Subject: MEMS Session: Jul – Dec 2020
Subject Code: 17AEDE732 Duration: 3 HRS
Date of Examination:19-10-2020 , Max Marks:10 X 10 = 100
Note: Answer all Questions and each full question carries 10 Marks.
✓ Provide neat diagrams wherever applicable.
Bloo
Ma
Question m’s COs
Q.No rks
Level
1a Which of the following form the basis of Electrical domain? 1 L1 CO
(A) Current B) Resistance (C) Inductance (D) All of the above 2
1b The sensors are classified on the basis of 1 L1 CO
(A) Functions (B) Performance (C) Output (D) All of the above 2
1c The following is not a static performance parameter to be looked 1 L1 CO
into before selecting a parameter. 2
(A) Range (B) Deflection (C) Stability (D) Error
1d The following main dynamic characteristic(s) is usually 1 L1 CO
considered in Mechatronics application of sensors. 2
(A) Response time (B) Rise time (C) Time constant (D) All of the
above
1e A piezo-electrical crystal generates voltage when subjected to 1 L1 CO
____ force. 2
(A) Electrical (B) Mechanical(C) Gravity(D) All of the above
1f Following type of sensors are used to generate information in 1 L1 CO
object grasping and obstacle avoidance. 2
(A) Hall Effect sensor (B) Proximity sensor (C) Light sensor
(D) Optical sensors
1g The ____________________ converts the compressed air energy 1 L1 CO
into mechanical energy in the form of linear movement in one 2
direction only.
a) Piston cylinders b) Double acting cylinders c) Single acting
cylinders d) Hydraulic pumps
1h Pneumatic and other power systems can support three kinds of 1 L1 CO
motion; they are 2
a) Linear, reciprocating, and random motion b) Linear, flowing,
and rotary motion c) Linear, zigzag, and spiral motion d) Linear,
reciprocating, and rotary motion
Page 1 of 2
, 1i The scientific principle that makes hydraulic systems possible is a) 1 L1 CO
Pascal’s principle b) Boyle’s law c) Bernoulli’s principle d) The 2
fluid flow principle
1j How is fly by wire system implemented in an aircraft? 1 L1 CO
a) By using control rods and linkages connecting stick to control 2
surfaces b) By using high power radio transmitters and receivers
c) By using computers and actuators to control surfaces
d) Artificial intelligence
2a Draw the schematic of FADAC and explain briefly each block 7 L2 CO
2
Course Outcomes
Page 2 of 2
USN
B.Tech.7th Sem TEST - I
Subject: MEMS Session: Jul – Dec 2020
Subject Code: 17AE Duration: 3 HRS
Date of Examination: 07-09-2020 , Max Marks:10 X 10 = 100
Note:
✓ Answer all Questions and each full question carries 10 Marks.
✓ Provide neat diagrams wherever applicable.
Bloom’s
Mark
Q.N Question Level COs
s
o
1a CVD stands for in semiconductor process as 1 L1 CO1
a) Critical vacuum deposition b) Chemical vacuum
deposition c) Controlled vacuum deposition
1b Mathematical model used for diffusion 1 L1 CO1
a)Fourier’s Transform b)Newton’s Law c) Fick’s law
1c Energy source used for Ion Implantation 1 L1 CO1
a) an ion beam b) Heating c) EM wave
1d ) Pressure drop in a fluid through the smaller circular 1 L1 CO1
conduit is Much greater b) about equal c) much less than
larger conduct
1e wet oxidation is 1 L1 CO1
a) faster than dry oxidation b) slower than plasma
oxidation c) slower than dry oxidation
1f Barometer uses 1 L1 CO1
a) Pressure Sensor b) Gyroscope c) Laser Diode
1g P type silicon is doped with 1 L1 CO1
a) Antimony b) Boron c) Nickel
1h For fine resolution photoresist used is 1 L1 CO1
a) Negative b) Positive c) polymer
1i CMOS uses 1 L1 CO1
a) lower power b) Higher power c) none
1j Melting point of silicon is 1 L1 CO1
a) 1200 deg C B) 1410 deg C C) 1800 deg C
2a Explain important applications of Micro Systems in 6 L2 CO1
Automobile and Aerospace Application
Page 1 of 2
, Course Outcomes
CO - 1 Understand the basics Micro Electro Mechanical Systems(MEMS) and Applications
CO - 2 Analyze the scaling laws and its practical use
CO - 3 Understand Mechanical, Electrical and Electronic aspects of sensors and actuators
CO - 4 Apply the MEMS devices for aerospace application .
L1 L2 L3 L4 L5 L6
Remembering Understanding Applying Analyzing Evaluating Creating
Course Outcomes:
Mapping Course Outcomes with Program Outcomes:
CO/PO: Mapping
(3/2/1 indicates strength of correlation) 3-Substantial (High), 2-Moderate (Medium), 1-Slight (Low)
Course Program Outcome (POs)
Outcome
PO1 PO2 PO3 PO4 PO5 PO6 PO7 PO8 PO9 PO10 PO11 PO12
(COs)
CO-1 3 1 1 1 1 1
CO-2 3 1 1 1 1
CO-3 3 1 1 1 1
CO-4 3 1 1 1 1 1
Q02 – 09 can have subdivisions (Like 3a and 3b
Page 2 of 2
, AEROSPACE ENGINEERING DEPARTMENT
USN
B.Tech.7th Sem TEST - II
Subject: MEMS Session: Jul – Dec 2020
Subject Code: 17AEDE732 Duration: 3 HRS
Date of Examination:19-10-2020 , Max Marks:10 X 10 = 100
Note: Answer all Questions and each full question carries 10 Marks.
✓ Provide neat diagrams wherever applicable.
Bloo
Ma
Question m’s COs
Q.No rks
Level
1a Which of the following form the basis of Electrical domain? 1 L1 CO
(A) Current B) Resistance (C) Inductance (D) All of the above 2
1b The sensors are classified on the basis of 1 L1 CO
(A) Functions (B) Performance (C) Output (D) All of the above 2
1c The following is not a static performance parameter to be looked 1 L1 CO
into before selecting a parameter. 2
(A) Range (B) Deflection (C) Stability (D) Error
1d The following main dynamic characteristic(s) is usually 1 L1 CO
considered in Mechatronics application of sensors. 2
(A) Response time (B) Rise time (C) Time constant (D) All of the
above
1e A piezo-electrical crystal generates voltage when subjected to 1 L1 CO
____ force. 2
(A) Electrical (B) Mechanical(C) Gravity(D) All of the above
1f Following type of sensors are used to generate information in 1 L1 CO
object grasping and obstacle avoidance. 2
(A) Hall Effect sensor (B) Proximity sensor (C) Light sensor
(D) Optical sensors
1g The ____________________ converts the compressed air energy 1 L1 CO
into mechanical energy in the form of linear movement in one 2
direction only.
a) Piston cylinders b) Double acting cylinders c) Single acting
cylinders d) Hydraulic pumps
1h Pneumatic and other power systems can support three kinds of 1 L1 CO
motion; they are 2
a) Linear, reciprocating, and random motion b) Linear, flowing,
and rotary motion c) Linear, zigzag, and spiral motion d) Linear,
reciprocating, and rotary motion
Page 1 of 2
, 1i The scientific principle that makes hydraulic systems possible is a) 1 L1 CO
Pascal’s principle b) Boyle’s law c) Bernoulli’s principle d) The 2
fluid flow principle
1j How is fly by wire system implemented in an aircraft? 1 L1 CO
a) By using control rods and linkages connecting stick to control 2
surfaces b) By using high power radio transmitters and receivers
c) By using computers and actuators to control surfaces
d) Artificial intelligence
2a Draw the schematic of FADAC and explain briefly each block 7 L2 CO
2
Course Outcomes
Page 2 of 2
