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Lecture notes

Introduction to Nano Device Fabrication

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Uploaded on
September 20, 2025
Number of pages
22
Written in
2025/2026
Type
Lecture notes
Professor(s)
Dr kurebayashi hidekazu
Contains
All classes

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Electronic Devices and Nanotechnology

Topic 1-1:
Introduction to Nano-Device Fabrication

,Integrated Circuit Device Density
Historical Progression
Technology node Rate: -15.5%/yr
(e.g. ‘10 µm node’) Halving every 4.5 years.




Michel Calame, Basel




Commercial Development

2020: TSMC and Samsung deliver 5 nm chips
Future
3 nm - ~ 2022
2 nm - ~ >2023 ??

, Moore’s “Law”
1965:
“The complexity for minimum component
costs has increased at a rate of roughly a
factor of two per year.”
G.E. Moore, Elec. Mag., April 1965




The number of transistors on a chip doubles every 2 years

The minimum feature size x every 2 years

The cost of a manufacturing plant doubles every 2 years



Prof. D.J. Paul, University of Glasgow
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