Fabrication Engineering at the Micro- and Nanoscale (2013 Edition) – Solutions Manual – Campbell

1224567189 6  

, 89 9 9 999




9 
!9!9"#
#$8!
%&0'()*+
,+3-+5.
,+/0*12-
23
3.235
3-+
3.

453678
3678
5367'8
453678
53678
367'8
43678
53678
5367'8
3,9
43678
3678
367'&

)*+
9/5.3,:+
;06%
367
<
=&%>7
,3&

)*+
/2,/:
?+,0.*5
3-+
0/@+,
35
-
23A
0

B
=&=C0
,3
3,9
-
455;

B
=&%%
,3&
)*+,
.*+
5D3
2E
.*+

/2,/:
9/5.3,:+5
/5
5?/0*.?F
?3-0+-
.*3,
.*+
3
5G3:/,0
/,
.*+
:-F5.3?&

%&%'(H2-
.*+
23
3.23
3.
43678
3678
367'8
.*+
E2-
,+3-+5.
,+/0*12-5
3-+
3.I

4=8
=8
='8
436%8
36%8
='8
436%8
=8
36%'
3,9
4=8
36%8
36%'&

)*+F
3-+
.*+
45
3.235
2,
.*+
E3:+5
2E
.*+
D,/.
:+??&



%&;3'
J+E+--/,0
.2
.*+
G*35+
9/30-33
E2-
2+K/8
3.
00==
2L8
.*+
+MD/?/1-/D3
:2,:+,.-3./2,

/,
.*+
3+?.
/5
0/@+,
35
0>N&
2
1'()*+
+,./-+
:*3-0+
3+?.5
3.
00O=
L&

:'(PE
.*+
33.+-/3?
/5
/,
+MD/?/1-/D38
312D.
>=N
2E
.*+
52?/9
/5
5/?/:2,&



%&7'
4::2-9/,0
.2
.*+
G*35+
9/30-33
E2-
23458
3,9
+Q2:+55
23
R/??
.+,9
.2
G-+:/G/.3.+
2D.

35
3
?/MD/9
4GD-+
23'
/E
.*+
.+3G+-3.D-+
/5
312@+
%O&C
L&
K/,:+
.FG/:3?
0-2R.*

.+3G+-3.D-+5
3-+
3D:*
*/0*+-
.*3,
.*/58
9-2G?+.5
R/??
E2-3
2,
.*+
5D-E3:+&
S*+,
.*+

33.+-/3?
/5
.*+,
?2R+-+9
.2
-223
.+3G+-3.D-+8
.*+5+
9-2G?+.5
5*2D?9
1+
5?2R?F
3152-1+9

13:T
/,.2
.*+
5.2/:*/23+.-/:
2345
R*+-+
.*+F
52?/9/EF&

%&>'
K2?/9
52?D1/?/.F
/5
3,
+MD/?/1-/D3
@3?D+&
P.
/5
G255/1?+8
3,9
/,
E3:.
/5
2E.+,
9+5/-31?+8

.2
/,:2-G2-3.+
3,
/3GD-/.F
:2,:+,.-3./2,
R+??
312@+
.*+
52?/9
52?D1/?/.F&
KD:*
3
3/Q.D-+

R/??
.+,9
.2
G-+:/G/.3.+
2@+-
./3+8
1D.
3.
-223
.+3G+-3.D-+
.*+
./3+
5:3?+5
/,@2?@+9
33F



1+
52
?2,0
35
.2
G-+:?D9+
3,F
9+.+:.31?+
332D,.
2E
G-+:/G/.3./2,&

%&U
4::2-9/,0
.2
VMD3./2,
X%&08
%%
]; ]%&U^66
_` 0= ];
W6Y
>
Z0= [\ ^ Y
%
Z0=
[\

)*+,


%%


%&U^6Y
?,
>Z0=
Y
%C&>


_` %
Z0=0=

K2?@/,0

`Y
%C&>ZC&U%%&
UZ^06
=
^66
a
]> Y
0 = > C a Y

bCX
>c
d,+
:3,
D5+
.*/5
.+3G+-3.D-+
.2
5e2
?@+
.*+
0G=
-21]?;+
3

f354
g

]
g'
6
_`
W Y
%
Z0= [\ ^ h i
e
6
ji
H-23
H/0
;&78
,/<%Z0=
:3 &
K/,:+
kl2-2,mm,/8
G<
,/&
)*+,

0C 5;



0


, 9




 


8



0
8

0

0




!
"#$"

%&
$'
#(
)
&%'

*
2
+
%&
$'
#(
)


$&,

-.
+/
0%'


*122%,
!-*1
#)
9 3


.
8 
4




 
 
  8


 5
0
8
0
8
6


6
7
08&%(
9:
0,


?
; =>
< 0

0&
'

0
8
0@


 =>@
&
'

1''+")%(
+
9:
0,
0 < <0@
A34
0
8 => 


<<
8 
=><

B.
CC>
0D"+
9:
0 ,

#F

35

8
E46
6GH E47%
IJK=
*+


#
L


"

%&





" #
'+)$'%M%N,
+
O+P #Q&
'+&#
#)
%&
#
R$'%+
+R


!
"#$"





M#$

%
1!!
)%F
SS
'+""
&!+)&
+
"++

!
"#$"

S
%&
T

"



"
R+3"


+
$&




M0#U$V


@(
=%M>


3%A


#T

00
 4
 #F

5
0UW>@
=><
8
<U=KX@
W>8
UUY@
=KX8
3A@
=>6

 =>@
&
'

0.B=>@
ZI
6
7
0 D"+



'
#!
"

A;4

A3;
4

D+"
T+"+,
L-
1
F-,

A;4



8
A3; 0


8
A3
<
8 .
=><

0+M%(,
/+-<.8 .
' [<




. < 0
A;4


<.
8
=> ;

U.
8 .
=><



00S%%#N





'+'
"#%+
%&

A3
 @

.

D+"
#"&
%',
L-<,
&+
$&%(
9:
0<
<


=> 

A;4
.8
00
=><

<8

;
\

 .



BB

;
4


4
<<

]"
<<^
+R



T+$

%&
$&#T




0<#+
SR



T+$

%&
:$
'

),
+

%(


F'

)

0

&+[%<)
&+$T%%N
D"+
D%(
0U,
#

U
/,



&+%)
&+$T%%N
%&
#!!"+F%#
N
B8
' 


0


, 7890
97
0






987



 97!977



"

8
#$

987%
&
8'
8!%9(
)
(87

*&
8++
7 0
7890
,

-,. 9
 /
-0.
-,
1. 9
 8'
.
28!97
08

7 0

7893
4
$
$

5*
&
6529
(
*6(9

4
$$"/
1.80!8
4
$



-
(
3
908
(#$8!

5*
&
08!
9
9
(
*

7
8

99
:
"
9
/


-
3 ;
90+

89
08293
98+99+

8!
!8!90
78'99+

8+
98 9
28'9



789!
5*&

&
65 2&

80!

89%
&
08!
9(!%
&
982!
99'
<=(0

789!

5*
&
765 2&
6529
(
*6(9

7
&
9
(
*6(9
&
9
(
*(8!

7(9

8!
&
9
(
*
#$9
.8 8
,

$
"



9


8/
$

8




"

8


9
$
8

789!
>
./
1-?.1-@8

>
.8!/

65245

9
(
8!6(9
&
765
9
(
8!(8!

26
8!6(9
&
78!(8!
&
0893

,
:
8
$

A"

B"


1
9
8!
A$
$



$


8



789
7
C
8
8A$/
$
"






A
$
$
"


9





9



8
$"8$
:





9




8






0