ECE 4360
Cornell University College Of Veterinary Medicine
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hw3_answer keys_edit_210513 ECE 4360
- Exam (elaborations) • 7 pages • 2022
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ECE 4360/MSE 5410 – Spring 2020 Prof. Grace Huili Xing - Cornell
HW#3-1
NanoFabrication and Characterization of Electronics
Homework set #3
Name: _________Solutions____
1. (20 points) (Parameter values in a Typical Plasma System) We
have learned the plasma system in PECVD, sputtering and dry etch
without knowing the values of various parameters in the system.
Plasma physics is beyond the scope of this fabrication course, but we
will use this homework to illustrate the parameter values...
Exam (elaborations)
hw3_answer keys_edit_210513 ECE 4360
Last document update:
ago
ECE 4360/MSE 5410 – Spring 2020 Prof. Grace Huili Xing - Cornell HW#3-1 NanoFabrication and Characterization of Electronics Homework set #3 Name: _________Solutions____ 1. (20 points) (Parameter values in a Typical Plasma System) We have learned the plasma system in PECVD, sputtering and dry etch without knowing the values of various parameters in the system. Plasma physics is beyond the scope of this fabrication course, but we will use this homework to illustrate the parameter values...
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